MEMS應用

ANSYS Multiphysics 功能

慣性裝置(Inertial Devices): 加速規(Accelerometers)與陀螺儀(Gyroscopes)

結構模態(Structural modal), 靜態(Static), 暫態(Transient), 靜電-結構(Electrostatic-Structural), 系統分析的降階模型(Reduced order macro modeling for system level).

表面聲波元件(Surface Acoustic Wave Devices)

聲場-結構耦合(Acoustic-Structural coupling)

微條狀元件(MicroStripline Components)

高頻電磁場(High Frequency electromagnetics)

微補片與分形天線(Micro-patch and Fractal Antennas)

高頻電磁場(High Frequency electromagnetics)

噴墨印表機的壓電列印頭(Piezo Inkjet Printheads)

直接結構-靜電場耦合(Direct coupled structural-electric physics), VOF自由表面(Free surfaces)與毛細作用(Capillary action).

噴墨印表機的熱列印頭(Thermal Inkjet Printheads)

電-熱-結構耦合(Electro-thermal-structural coupled physics).

熱-結構耦合(Thermal-structural coupled physics).

微質量頻譜儀(Micro mass spectrometers)

電磁(Electromagnetics)與帶電粒子軌跡(charged particle tracing)

靜電梳狀驅動器(Electrostatic comb drives)

靜電場-結構耦合(Electrostatic - structural coupling). 電容抓取(Capacitance extraction).

微流體流道(Microfluidic Channels)

牛頓/非牛頓連續流(Newtonian/non-Newtonian continuum flow)

壓電致動器(Piezoelectric actuators)

直接結構-靜電耦合(Direct coupled structural-electric physics)

壓力致動器(Pressure transducers)

電容式(Capacitance based): 靜電場-結構耦合(Electrostatic-structural coupling).
壓阻式(Piezo-resistive based): 電-結構間接耦合(Electro-Structural indirect coupling)

電機械RF濾波器(Electromechanical RF filters)

靜電場-結構耦合(Electrostatic-structural coupling).
電容抓取(Capacitance extraction).

微鏡片技術(Micromirror technology)

靜電場-結構耦合(Electrostatic-structural coupling). 流體阻尼(Fluid damping effects)

微抓取器(Micro-grippers)

電-熱-結構耦合(Electro-thermal-structural coupling).

微TIP場發射器(Micro TIP field emitters)

靜電場(Electrostatics)與帶電粒子軌跡(charged particle tracing)

微齒輪組合(Micro-Gear assemblies)

機械接觸與磨擦(Mechanical with complex contact, friction).

熱電致動器(Thermoelectric actuators)

電-熱-結構耦合(Electro-thermal-structural coupled physics)

磁變形致動器(Magnetostrictive actuators)

低頻電磁場(Low Frequency electromagnetics)