VizGlow software tool is used for high-fidelity multi-dimensional modeling of non-equilibrium plasma discharges.
Features:
- 1-D, 2-D (planar/axisymmetric) and 3-D problems
- Self-consistent (sheath+plasma) and quasi-neutral formulation
- Multi-species, multi-temperature formulation
- Finite-rate gas chemistry (complex gas mixtures) and surface chemistry (etching, deposition, etc.)
- Coupling to electromagnetics, fluid-flow, and particle models
- Photoionization model
- Valid over range of pressures ~mTorr to ~atm.
- Unstructured mixed mesh framework
- Parallel computing
Applications:
- Thin film etching / deposition / cleaning
- Lighting and display
- Aerodynamic flow control
- Chemical processing
- Combustion ignition / stabilization
- Biomedical (e.g. sterilization)
- Plasma propulsion
- Plasma metamaterials
Industries Served:
- Semiconductor equipment makers
- Semiconductor IC manufacturers
- Solar cell manufacturers
- Flat-panel display manufacturers
- Automotive industry (e.g. next generation combustion ignition)
- Aerospace industry (e.g. flow control, plasma propulsion)
- Electrical device manufacturers
Download VizGlow Brochure